By Rebecca Ingle, Ph.DFeb 8 2024Reviewed by Megan Craig, M.Sc. Atomic force microscopy is an experimental technique that has been embraced in all areas of nanoscience.1 The very high spatial resolutions achievable with AFM, which can be < 1 nm, have enabled the imaging of nanoscale structures and fabrication patterns.2 AFM has become indispensable to the semiconductor industry for both the fabrication and quality control of new semiconductor devices.
Mapping the amount of force onto the position of the translation stage makes it possible to build up an image of the object being scanned, as the greater the intermolecular interactions from the surface to the tip due to a particular element or raised area, the greater the force applied to the tip. See our full range of equipment. Importance of Electrical AFM in the Semiconductor Industry Related StoriesElectrical AFM is used for a variety of applications in the semiconductor industry, including fault detection and quality inspection of devices. Electrical AFM can also be very useful for analyzing charge distributions in devices and quantitative analysis of the charge levels in different regions of a device.
Advantages of Electrical AFM for Semiconductor Characterization The key advantages of electrical AFM for the semiconductor industry are as follows: Reduced footprint and energy consumption are necessary not just for increasing the cost-effectiveness of devices or reducing environmental impact but also for enabling remote technologies such as sensing for unmanned aerial vehicles that are used in a number of industries, as well as for climate monitoring.
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