Automated AFM Solutions for the Semiconductor Industry

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This article discusses delivering advanced cleanroom-compliant, automated AFM solutions for the semiconductor industry.

Sponsored by Nanosurf AGNov 2 2023Reviewed by Olivia Frost Nanosurf is a leading provider of innovative atomic force microscope measurement equipment. By delivering measurement solutions for quality control, Nanosurf contributes to the progression of the semiconductor industry.

AFM systems have historically only been able to accommodate small samples that are a few millimeters or centimeters in diameter. The main reason for this is that for a small mechanical loop, i.e., the shortest track through the AFM hardware that mechanically connects the AFM cantilever tip and the actual measurement site, it is easier to achieve good system stability and, thus, low noise levels.

Numerous rounds of system design evaluations, plus subsequent improvements and safety evaluations , are conducted to attain the necessary performance standards. During the commissioning phase, user-machine interaction must also be considered. The PLC interface enables operators who are not AFM specialists to effortlessly run the machine by loading pre-defined operational sequences or “recipes.”

 

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